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Product code | MTPA1000XY |
Table size | 70mm×70mm |
Guide mechanism | Gothic-Arch |
Material | Stainless |
Coarse adjustment with micrometer | 13mm |
Fine adjustment with Piezo Assist | 60μm |
Coarse adjustment method | Micrometer |
Fine adjustment method | Piezoelectric actuator |
Adjustment resolution | 20nm |
Straightness | ≦1μm/13mm |
Minimum readout of micrometer | 10μm/div |
Moment load stiffness | 0.1 arcsec/N・cm |
Load capacity (horizontal) | 117.6N(12kgf) |
Environment | Temperature:0~85℃ Humidity:Below 40% |
①Piezo Assist Precision Stage | ×1 |
②Control box | ×1 |
③Cable | ×2 |
④AC adapter for control box | ×1 |
1. This device produces high voltage and should be used by qualified personnel.
2. Do not break up the Piezo Assist Precision Stage or the control box.
3. Do not drop or applied any external force towards the Piezo Assist Precision Stage
or the control box.
We can tailor the products base on your needs. Please feel free to contact us.